Spectroscopy in Thin Film Fabrication
Used across many industries such as semiconductors, technology gadgets, and optical elements, thin films carry a very important roll in our world. Because of its wide range in applicability, the accuracy of thickness and repeatability are extremely important. Therefore, a measurement technique is crucial to ensure surface thickness accuracy. Presently there are three common techniques to qualitate surface thickness; stylist profilometry, ellipsometry, and spectral reflectance. In this application note, we discuss in detail the spectral reflectance technique and a typical setup using Avantes spectroscopy equipment.
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