Optical Emission Spectroscopy for Plasma Systems

Posted on: February 27th, 2023

Optical emission spectroscopy is a powerful tool for monitoring plasmas in situ, enabling process optimization and control. It is used to measure the energy difference between excited and ground states of neutral atoms and molecules and can help to precisely control the parameters of the plasma to maintain stable, reliable, and reproducible processes.

Avantes multichannel spectrometer systems provide high spectral resolution to separate closely-spaced peaks in plasma applications, even allowing for the characterization of excited molecules. The AvaSpec-ULS4096CL-EVO from Avantes utilizes CMOS sensors for faster and more accurate performance, with integration times down to 9 μs and a resolution of 0.05 nm in the range of 200 nm to 400 nm. This device is suitable for even the most advanced plasma analysis applications.

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