cart My Cart 0
☰ Menu

Optical Emission Spectroscopy & Plasma Diagnostics

Plasma is the result of the breakdown of the atomic shell of a molecule under continual application of energy beyond the gaseous state which forms a cloud of ionized, or charged, particles. Each element of the periodic scale has a unique spectral signature, using optical emission spectroscopy (OES) to monitor the plasma and identify the component atomic elements of the plasma being sampled. Using this measurement technique would also identify additions or changes to the composition of the plasma.

Plasma measurements produce a large number of spectral peaks, to separate those peaks, Avantes’ modular design and multi-channel capability provide an excellent alternative to higher-priced traditional optical emission spectroscopy systems. With a multichannel array, each instrument is configured to cover a short wavelength range with an incredibly high resolution. The instruments are connected via fiber optics which converge into a single terminal at the collection point.

Consider one of Avantes’ two preconfigured instrument bundles designed especially for plasma and optical emission spectroscopy measurements, available in four channels or the ultra-high resolution eight channel plasma setup for desktop or rack mount installation. Or work with your qualified Avantes sales engineers to design the perfect system to meet your needs.

Plasma Spectroscopy Applications

Optical Emission Spectroscopy (OES) is useful for controlling plasma processes such as one might find in the manufacturing of semiconductors and photovoltaic cells using physical vapor deposition or plasma enhanced vapor deposition to deposit thin films on silicon wafers. Optical emission spectroscopy is also frequently used for endpoint detection during the etching of photoresist, a light reactive substance, or to monitor for contamination in Lithography systems, both methods used to form a patterned coating on a surface such as for printed circuit boards. In the Biochemical industry, optical emission spectroscopy is used to monitor plasma deposition of films designed to improve biocompatibility for implants.

Read More

Plasma & Optical Emission Spectroscopy Instruments

product image

AvSpec-ULS2048CL-EVO

The StarLine AvaSpec-ULS2048CL-EVO offers you this latest technology using CMOS instead of the conventional CCD technology. In combination with our latest AS-7010 electronics, it offers you a versatile device including USB3.0 communication with 10x higher speed communications and 50x more memory. The AvaSpec-ULS2048CL-EVO is also available as OEM unit, bench-only or rackmount version.

Get Product Information
product image

AvaSpec-ULS4096CL-EVO

The AvaSpec-ULS4096CL-EVO features our latest AS-7010 electronics and offers USB3.0 communication with 10x higher speed than USB2 and a second communication port which offers Gigabit Ethernet for network integration or remote communications. The EVO also offers a fast microprocessor and 50x more memory to store more spectra onboard and increase functionality. Options include detector collection lens, a range of slit sizes, gratings, and connectors.

Get Product Information
product image

AvaSpec-Mini4096-MKII (CL)

The next generation of AvaSpec-Mini spectrometers feature CMOS detectors and advanced electronics and communications. Like the original AvaSpec-Mini, the Mini-MKII from the CL series is only the size of a deck of cards, and boasts excellent temperature and wavelength stability. Enjoy the speed and enhanced native UV/NIR response of CMOS with incredible resolution to 0.1 nm unavailable anywhere else.

Get Product Information

Plasma/ OES Resources

Download: Plasma & Optical Emission Spectroscopy Application Note

Download

High Resolution Plasma Instrument Bundle

See Specs

Extremely High Resolution Plasma Instrument Bundle

Get Specs

Plasma Measurement Monitoring Information Page

Read More

High Resolution Plasma Measurements Information Page

Read More

Spectra of the Month Feature: Plasma Spectra

See Data

Related Accessory: Vacuum Feedthroughs

Shop Now

Related: Laser-Induced Breakdown Spectroscopy

Read More

Related: LIBS in the Field

Read More

Related: Solutions for the Semiconductor Industry

Read More

Related: Spectroscopy for Thin Films and Coatings

Read More

Download: Plasma OES Application Note (US Version)

Download

Design Your Optical Emissions Spectroscopy System

Discover More Recent Applications in Spectroscopy

Posted on: August 20th, 2019

Laser-Induced Breakdown Spectroscopy in the Physical Sciences

LIBS in the Physical Sciences app note 190515 Laser-Induced Breakdown Spectroscopy employs a laser to ablate the surface of a…

Read More

Posted on: July 23rd, 2019

Spectroscopy in Thin Film Fabrication

Used across many industries such as semiconductors, technology gadgets, and optical elements, thin films carry a very important roll in…

Read More

Posted on: July 16th, 2019

Spectra: Thin Film

Avantes engineers have been thinking "thin" this month, thin film that is. We are sharing thin film measurement data from…

Read More