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Optical Emission Spectroscopy & Plasma Diagnostics

Plasma is the result of the breakdown of the atomic shell of a molecule under continual application of energy beyond the gaseous state which forms a cloud of ionized, or charged, particles. Each element of the periodic scale has a unique spectral signature, using optical emission spectroscopy (OES) to monitor the plasma and identify the component atomic elements of the plasma being sampled. Using this measurement technique would also identify additions or changes to the composition of the plasma.

Plasma measurements produce a large number of spectral peaks, to separate those peaks, Avantes’ modular design and multi-channel capability provide an excellent alternative to higher-priced traditional optical emission spectroscopy systems. With a multichannel array, each instrument is configured to cover a short wavelength range with an incredibly high resolution. The instruments are connected via fiber optics which converge into a single terminal at the collection point.

Consider one of Avantes’ two preconfigured instrument bundles designed especially for plasma and optical emission spectroscopy measurements, available in four channels or the ultra-high resolution eight channel plasma setup for desktop or rack mount installation. Or work with your qualified Avantes sales engineers to design the perfect system to meet your needs.

Plasma Spectroscopy Applications

Optical Emission Spectroscopy (OES) is useful for controlling plasma processes such as one might find in the manufacturing of semiconductors and photovoltaic cells using physical vapor deposition or plasma enhanced vapor deposition to deposit thin films on silicon wafers. Optical emission spectroscopy is also frequently used for endpoint detection during the etching of photoresist, a light reactive substance, or to monitor for contamination in Lithography systems, both methods used to form a patterned coating on a surface such as for printed circuit boards. In the Biochemical industry, optical emission spectroscopy is used to monitor plasma deposition of films designed to improve biocompatibility for implants.

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Plasma & Optical Emission Spectroscopy Instruments

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The StarLine AvaSpec-ULS2048CL-EVO offers you this latest technology using CMOS instead of the conventional CCD technology. In combination with our latest AS-7010 electronics, it offers you a versatile device including USB3.0 communication with 10x higher speed communications and 50x more memory. The AvaSpec-ULS2048CL-EVO is also available as OEM unit, bench-only or rackmount version.

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The AvaSpec-ULS4096CL-EVO features our latest AS-7010 electronics and offers USB3.0 communication with 10x higher speed than USB2 and a second communication port which offers Gigabit Ethernet for network integration or remote communications. The EVO also offers a fast microprocessor and 50x more memory to store more spectra onboard and increase functionality. Options include detector collection lens, a range of slit sizes, gratings, and connectors.

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AvaSpec-Mini4096-MKII (CL)

The next generation of AvaSpec-Mini spectrometers feature CMOS detectors and advanced electronics and communications. Like the original AvaSpec-Mini, the Mini-MKII from the CL series is only the size of a deck of cards, and boasts excellent temperature and wavelength stability. Enjoy the speed and enhanced native UV/NIR response of CMOS with incredible resolution to 0.1 nm unavailable anywhere else.

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Plasma/ OES Resources

Download: Plasma & Optical Emission Spectroscopy Application Note


High Resolution Plasma Instrument Bundle

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Extremely High Resolution Plasma Instrument Bundle

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Plasma Measurement Monitoring Information Page

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High Resolution Plasma Measurements Information Page

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Spectra of the Month Feature: Plasma Spectra

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Related Accessory: Vacuum Feedthroughs

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Related: Laser-Induced Breakdown Spectroscopy

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Related: LIBS in the Field

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Related: Solutions for the Semiconductor Industry

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Related: Spectroscopy for Thin Films and Coatings

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Download: Plasma OES Application Note (US Version)


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Test Drive Avantes Solutions for Plasma and Optical Emission Spectroscopy

Dare to compare: test drive an Avantes instrument in your application and experience the difference in person.